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PZT[remove]2
multicomponent target2
control of stoichiometry1
depozice iontovým svazkem1
ion beam deposition1
ion beam sputtering1
kyslík1
naprašování iontovým svazkem1
oxygen1
přebytek olova1
vícesložkový keramický terč1
vícesložkový terč1
řízení chemického složení1

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THE LINDAT/CLARIAH-CZ PROJECT (LM2023062; formerly LM2010013, LM2015071, LM2018101) IS FULLY SUPPORTED BY THE MINISTRY OF EDUCATION, SPORTS AND YOUTH OF THE CZECH REPUBLIC UNDER THE PROGRAMME LM OF "LARGE INFRASTRUCTURES"